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Journal description
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Details for article 13 of 16 found articles
| Title: |
Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode |
| Author: |
Ito, R. Wakui, M. Sameshima, H. Hu, F.-R. Hane, K. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 16 (2010) nr. 6 pages 1015-1020 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 16 found articles
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