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Journal description
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Details for article 12 of 16 found articles
| Title: |
Novel interconnection technology for heterogeneous integration of MEMS–LSI multi-chip module |
| Author: |
Lee, Kang-Wook Koyanagi, Mitsumasa |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 16 (2009) nr. 3 pages 441-447 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 16 found articles
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