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Journal description
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Details for article 6 of 17 found articles
| Title: |
Factorial experimental design applied to DRIE for optimised process in power electronics applications requiring high-aspect ratio trenches |
| Author: |
Brunet, Magali Dubreuil, Pascal Mahfoz-Kotb, Hicham Gouantes, Aline Dorthe, Anne-Marie |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 15 (2009) nr. 9 pages 1449-1457 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 17 found articles
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