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Journal description
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Details for article 9 of 16 found articles
| Title: |
Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining |
| Author: |
Rakwal, Dinesh Heamawatanachai, Sumet Tathireddy, Prashant Solzbacher, Florian Bamberg, Eberhard |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 15 (2009) nr. 5 pages 789-797 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 16 found articles
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