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Journal description
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Details for article 4 of 18 found articles
| Title: |
Bonded thick film SOI with pre-etched cavities |
| Author: |
Suni, Tommi Henttinen, Kimmo Dekker, James Luoto, Hannu Kulawski, Martin Mäkinen, Jari Mutikainen, Risto |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 12 (2006) nr. 5 pages 406-412 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 18 found articles
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