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Journal description
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Details for article 19 of 29 found articles
| Title: |
Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring |
| Author: |
Aigeldinger, G. Ceremuga, J. T. Skala, D. M. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 11 (2005) nr. 4-5 pages 379-384 |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 29 found articles
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