|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 12 of 28 found articles
| Title: |
High-aspect-ratio microstructure filling by centrifugal force field modeling |
| Author: |
Tsai, T.-H. Yang, H. Chein, R. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 10 (2004) nr. 6-7 pages 571-577 |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 28 found articles
| << previous | next >> |