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  A numerical molecular dynamics approach for squeeze-film damping of perforated MEMS structures in the free molecular regime
 
 
Title: A numerical molecular dynamics approach for squeeze-film damping of perforated MEMS structures in the free molecular regime
Author: Li, Pu
Fang, Yuming
Wu, Haiqiang
Appeared in: Microfluidics and nanofluidics
Paging: Volume 17 (2014) nr. 4 pages 759-772
Year: 2014
Contents:
Publisher: Springer Berlin Heidelberg, Berlin/Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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