Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
Titel:
Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
Auteur:
Uglov, V. V. Anishchik, V. M. Astashynski, V. V. Astashynski, V. M. Ananin, S. I. Askerko, V. V. Kostyukevich, E. A. Kuz’mitski, A. M. Kvasov, N. T. Danilyuk, A. L.