Structural and electrical characteristics of a hyperdoped silicon surface layer with deep donor sulfur states
Titel:
Structural and electrical characteristics of a hyperdoped silicon surface layer with deep donor sulfur states
Auteur:
Ionin, A. A. Kudryashov, S. I. Makarov, S. V. Mel’nik, N. N. Rudenko, A. A. Saltuganov, P. N. Seleznev, L. V. Sinitsyn, D. V. Timkin, I. A. Khmelnitskiy, R. A.