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                                       Details for article 2 of 18 found articles
 
 
  Atomic and Electronic Structure of SiOx Films Obtained with Hydrogen Electron Cyclotron Resonance Plasma
 
 
Title: Atomic and Electronic Structure of SiOx Films Obtained with Hydrogen Electron Cyclotron Resonance Plasma
Author: Perevalov, T. V.
Iskhakzai, R. M. Kh.
Aliev, V. Sh.
Gritsenko, V. A.
Prosvirin, I. P.
Appeared in: Journal of experimental and theoretical physics
Paging: Volume 131 () nr. 6 pages 940-944
Year: 2021-02-04
Contents:
Publisher: Pleiades Publishing, Moscow
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 18 found articles
 
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