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Journal description
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Details for article 15 of 15 found articles
| Title: |
Ultraviolet exposure enhanced silicon direct bonding |
| Author: |
Liao, Guanglan Zhang, Xuekun Lin, Xiaohui Ma, Canghai Nie, Lei Shi, Tielin |
| Appeared in: |
Frontiers of mechanical engineering in China |
| Paging: | Volume 5 (2009) nr. 1 pages 87-92 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
SP Higher Education Press, Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 15 found articles
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