Characterization of single-crystal sapphire substrates by X-ray methods and atomic force microscopy
Titel:
Characterization of single-crystal sapphire substrates by X-ray methods and atomic force microscopy
Auteur:
Prokhorov, I. A. Zakharov, B. G. Asadchikov, V. E. Butashin, A. V. Roshchin, B. S. Tolstikhina, A. L. Zanaveskin, M. L. Grishchenko, Yu. V. Muslimov, A. E. Yakimchuk, I. V. Volkov, Yu. O. Kanevskii, V. M. Tikhonov, E. O.