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Journal description
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Details for article 10 of 22 found articles
| Title: |
Estimating thermal transport in deep X-ray lithography with an inversion method |
| Author: |
Chang, W.-J. Yang, Y.-C. Lin, C.-M. |
| Appeared in: |
Applied physics. B, Lasers and optics |
| Paging: | Volume 81 (2005) nr. 4 pages 543-548 |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 22 found articles
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