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Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity |
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Titel: |
Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity |
Auteur: |
Hecquet, Christophe Delmotte, Franck Ravet-Krill, Marie-Françoise Rossi, Sébastien de Jérome, Arnaud Bridou, Françoise Varnière, Françoise Meltchakov, Evgueni Auchère, Frédéric Giglia, Angelo Mahne, Nicola Nanaronne, Stefano |
Verschenen in: |
Applied physics. Part A, Materials science and processing |
Paginering: |
Jaargang 95 (2009) nr. 2 pagina's 401-408 |
Jaar: |
2009 |
Inhoud: |
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Uitgever: |
Springer-Verlag, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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