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Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching |
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Title: |
Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching |
Author: |
Neiss, E. Rehspringer, J.-L. Mager, L. Fort, A. Fontaine, J. Montgomery, P. Flury, M. Robert, S. |
Appeared in: |
Applied physics. Part A, Materials science and processing |
Paging: |
Volume 92 (2008) nr. 2 pages 351-356 |
Year: |
2008 |
Contents: |
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Publisher: |
Springer-Verlag, Berlin/Heidelberg |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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