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Journal description
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Details for article 68 of 78 found articles
| Title: |
Sacrificial etching of AlxGa1-xAs for III–V MEMS surface micromachining |
| Author: |
Kumar, P. Kanakaraju, S. DeVoe, D.L. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 88 () nr. 4 pages 711-714 |
| Year: |
2007-05-24 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 68 of 78 found articles
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