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Journal description
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Details for article 28 of 78 found articles
| Title: |
Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device |
| Author: |
Kwon, T.Y. Kim, Y.B. Eom, K. Yoon, D.S. Lee, H.L. Kim, T.S. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 88 (2007) nr. 4 pages 627-632 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 78 found articles
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