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Journal description
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Details for article 17 of 43 found articles
| Title: |
Fabrication of high-aspect-ratio silicon nanostructures using near-field scanning optical lithography and silicon anisotropic wet-etching process |
| Author: |
Kwon, S.J. Jeong, Y.M. Jeong, S.H. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 86 (2006) nr. 1 pages 11-18 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 43 found articles
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