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Journal description
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Details for article 10 of 43 found articles
| Title: |
Deep drilling on a silicon plate with a femtosecond laser: experiment and model analysis |
| Author: |
Matsumura, T. Nakatani, T. Yagi, T. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 86 () nr. 1 pages 107-114 |
| Year: |
2006-11-03 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 43 found articles
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