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Journal description
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Details for article 9 of 17 found articles
| Title: |
Investigation of W-Ge-N deposited on Ge as a diffusion barrier for Cu metallization |
| Author: |
Rawal, S. Norton, D.P. Anderson, T.J. McElwee-White, L. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 85 (2006) nr. 3 pages 325-329 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 17 found articles
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