|
| next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 1 of 33 found articles
| Title: |
Approaches to diffusion barrier creation and trench filling for copper interconnection formation |
| Author: |
Gromov, D.G. Mochalov, A.I. Klimovitskiy, A.G. Sulimin, A.D. Redichev, E.N. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 81 (2005) nr. 7 pages 1337-1343 |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 33 found articles
| next >> |