Exploration of the ultimate patterning potential achievable with high resolution focused ion beams
Titel:
Exploration of the ultimate patterning potential achievable with high resolution focused ion beams
Auteur:
Gierak, J. Mailly, D. Hawkes, P. Jede, R. Bruchhaus, L. Bardotti, L. Prével, B. Mélinon, P. Perez, A. Hyndman, R. Jamet, J.-P. Ferré, J. Mougin, A. Chappert, C. Mathet, V. Warin, P. Chapman, J.
Verschenen in:
Applied physics. Part A, Materials science and processing