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Journal description
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Details for article 1 of 28 found articles
| Title: |
Ablation and cutting of planar silicon devices using femtosecond laser pulses |
| Author: |
Bärsch, N. Körber, K. Ostendorf, A. Tönshoff, K.H. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 77 (2003) nr. 2 pages 237-242 |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 28 found articles
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