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Journal description
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Details for article 52 of 104 found articles
| Title: |
Interfacial modification mechanism of ALD-SiO2/4H-SiC heterojunction by synergistic nitrogen–oxygen-atmosphere RTA |
| Author: |
Huang, Feiqing Zheng, Li Cheng, Xinhong Yan, Limin Huang, Jianhao Liu, Zhongyu |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 128 () nr. 12 pages xx |
| Year: |
2022-12-01 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 52 of 104 found articles
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