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Effect of oxygen flow on the optical properties of hafnium oxide thin films by dual-ion beam sputtering deposition |
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Titel: |
Effect of oxygen flow on the optical properties of hafnium oxide thin films by dual-ion beam sputtering deposition |
Auteur: |
Fang, Shaobo Ma, Chong Liu, Weiming He, Junbo Wang, Cheng Chen, Gang Liu, Dingquan Zhang, Rongjun |
Verschenen in: |
Applied physics. Part A, Materials science and processing |
Paginering: |
Jaargang 128 () nr. 12 pagina's xx |
Jaar: |
2022-11-21 |
Inhoud: |
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Uitgever: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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