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Journal description
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Details for article 10 of 104 found articles
| Title: |
Comparison of C face (000 1¯) and Si face (0001) of silicon carbide wafers in femtosecond laser irradiation assisted chemical–mechanical polishing process |
| Author: |
Chen, Yuan-Di Liu, Hsiang-Yi Cheng, Chiao-Yang Chen, Chih-Chun |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 128 () nr. 12 pages xx |
| Year: |
2022-11-21 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 104 found articles
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