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Influence of nitrogen flow ratio on properties of c-axis oriented AlN films grown by RF magnetron sputtering |
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Titel: |
Influence of nitrogen flow ratio on properties of c-axis oriented AlN films grown by RF magnetron sputtering |
Auteur: |
Chen, Guifeng Li, Haoran Xie, Xinjian Xie, Luxiao Wang, Endong Liu, Guodong Zhang, Hui Lu, Bowen Li, Changxing Pei, Haobo |
Verschenen in: |
Applied physics. Part A, Materials science and processing |
Paginering: |
Jaargang 127 () nr. 11 pagina's xx |
Jaar: |
2021-10-06 |
Inhoud: |
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Uitgever: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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