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                                       Details for article 8 of 49 found articles
 
 
  Dependence of O2 and Ar2 flow rates on the physical properties of ATO thin films deposited by atmospheric pressure chemical vapor deposition (APCVD)
 
 
Title: Dependence of O2 and Ar2 flow rates on the physical properties of ATO thin films deposited by atmospheric pressure chemical vapor deposition (APCVD)
Author: Fadavieslam, M. R.
Sadra, S.
Appeared in: Applied physics. Part A, Materials science and processing
Paging: Volume 123 (2017) nr. 11 pages 1-10
Year: 2017
Contents:
Publisher: Springer Berlin Heidelberg, Berlin/Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 8 of 49 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands