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Journal description
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Details for article 28 of 37 found articles
| Title: |
Nanoscale gap filling for phase change material by pulsed deposition and inductively coupled plasma etching |
| Author: |
Ren, W. C. Liu, B. Song, Z. T. Jing, X. Z. Zhang, B. C. Xiang, Y. H. Xiao, H. B. Xu, J. Wu, G. P. Qi, R. J. Duan, S. Q. Yu, Q. Q. Feng, S. L. |
| Appeared in: |
Applied physics. Part A, Materials science and processing |
| Paging: | Volume 112 (2012) nr. 4 pages 999-1002 |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 37 found articles
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