Formation of iron and iron silicides on silicon and iron surfaces. Role of the deposition rate and volumetric effects
Titel:
Formation of iron and iron silicides on silicon and iron surfaces. Role of the deposition rate and volumetric effects
Auteur:
Gouralnik, A. S. Dotsenko, S. A. Galkin, N. G. Ivanov, V. A. Plotnikov, V. S. Pustovalov, E. V. Cherednichenko, A. I. Gutakovski, A. K. Neklyudova, M. A.
Verschenen in:
Applied physics. Part A, Materials science and processing