Uniformity study of wafer-scale InP-to-silicon hybrid integration
Title:
Uniformity study of wafer-scale InP-to-silicon hybrid integration
Author:
Liang, Di Chapman, David C. Li, Youli Oakley, Douglas C. Napoleone, Tony Juodawlkis, Paul W. Brubaker, Chad Mann, Carl Bar, Hanan Raday, Omri Bowers, John E.
Appeared in:
Applied physics. Part A, Materials science and processing