Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane
Titel:
Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane
Auteur:
Baake, Olaf Hoffmann, Peter S. Kosinova, Marina L. Klein, Andreas Pollakowski, Beatrix Beckhoff, Burkhard Fainer, Nadeshda I. Trunova, Valentina A. Ensinger, Wolfgang