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Journal description
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Details for article 11 of 23 found articles
| Title: |
Feasibility of a Real-Time Method in Determine the Extent of Pad Break-In During Copper Chemical Mechanical Planarization |
| Author: |
Han, Ruochen Sampurno, Yasa Philipossian, Ara |
| Appeared in: |
Tribology letters |
| Paging: | Volume 62 (2016) nr. 2 pages 1-6 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 23 found articles
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