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                                       Details for article 4 of 17 found articles
 
 
  Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices
 
 
Title: Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices
Author: Shen, Sihan
Meng, Yonggang
Appeared in: Tribology letters
Paging: Volume 52 (2013) nr. 2 pages 213-221
Year: 2013
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4 of 17 found articles
 
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