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Journal description
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Details for article 4 of 17 found articles
| Title: |
Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices |
| Author: |
Shen, Sihan Meng, Yonggang |
| Appeared in: |
Tribology letters |
| Paging: | Volume 52 (2013) nr. 2 pages 213-221 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 17 found articles
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