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Details for article 1 of 39 found articles
| Title: |
Analysis of Feature-Scale Wear in Chemical Mechanical Polishing: Modeling and Experiments |
| Author: |
Terrell, Elon J. Comes, Ryan B. Higgs, C. Fred |
| Appeared in: |
Tribology letters |
| Paging: | Volume 37 (2009) nr. 2 pages 327-336 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 39 found articles
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