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Journal description
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Details for article 3 of 9 found articles
| Title: |
Effects of Electrochemistry on Surface Roughness during Chemical-Mechanical Polishing of Copper |
| Author: |
Kulkarni, M. Baker, M. Greisen, D. Ng, D. Griffin, R. Liang, H. |
| Appeared in: |
Tribology letters |
| Paging: | Volume 25 (2006) nr. 1 pages 33-41 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Kluwer Academic Publishers-Plenum Publishers, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 9 found articles
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