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Journal description
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Details for article 1 of 16 found articles
| Title: |
Application of the Methodology of Energy and Environmental Analysis to Study the Air Removal System of Clean Rooms in Microelectronics |
| Author: |
Gundartsev, M. A. Karakeyan, V. I. Ryabyshenkov, A. S. Sharaeva, V. P. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 51 () nr. 7 pages 528-530 |
| Year: |
2023-01-09 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 16 found articles
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