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Journal description
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Details for article 1 of 7 found articles
| Title: |
Application of the Spectral Ellipsometry Method to Study the Processes of Atomic Layer Deposition |
| Author: |
Miakonkikh, A. V. Smirnova, E. A. Clemente, I. E. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 50 () nr. 4 pages 230-238 |
| Year: |
2021-07-17 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 7 found articles
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