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Journal description
All volumes of the corresponding journal
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Details for article 4 of 9 found articles
| Title: |
Features of the Kinetics of Bulk and Heterogeneous Processes in CHF3 + Ar and C4F8 + Ar Plasma Mixtures |
| Author: |
Murin, D. B. Efremov, A. M. Kwon, K.-H. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 48 (2019) nr. 2 pages 99-106 |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 9 found articles
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