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Journal description
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Details for article 8 of 16 found articles
| Title: |
New organometallic precursors and processes for chemical vapor deposition in the technology of nanomaterials |
| Author: |
Kuznetsov, F. A. Smirnova, T. P. Fainer, N. I. Morozova, N. B. Igumenov, I. K. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 42 (2013) nr. 8 pages 439-447 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 16 found articles
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