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                                       Details for article 14 of 16 found articles
 
 
  Studying the uniformity of the surface resistance of Ti, Al, Ni, Cr, and Au metal films on silicon
 
 
Title: Studying the uniformity of the surface resistance of Ti, Al, Ni, Cr, and Au metal films on silicon
Author: Vanyukhin, K. D.
Kobeleva, S. P.
Kontsevoi, Yu. A.
Kurmachev, V. A.
Seidman, L. A.
Appeared in: Russian microelectronics
Paging: Volume 42 (2013) nr. 8 pages 483-487
Year: 2013
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 14 of 16 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands