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Journal description
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Details for article 14 of 16 found articles
| Title: |
Studying the uniformity of the surface resistance of Ti, Al, Ni, Cr, and Au metal films on silicon |
| Author: |
Vanyukhin, K. D. Kobeleva, S. P. Kontsevoi, Yu. A. Kurmachev, V. A. Seidman, L. A. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 42 (2013) nr. 8 pages 483-487 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 16 found articles
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