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  A method for determining the state of the silicon-sapphire boundary in thin silicon-on-sapphire layers
 
 
Title: A method for determining the state of the silicon-sapphire boundary in thin silicon-on-sapphire layers
Author: Tikhov, S. V.
Pavlov, D. A.
Krivulin, N. O.
Appeared in: Russian microelectronics
Paging: Volume 42 (2013) nr. 8 pages 529-531
Year: 2013
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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