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Journal description
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All issues of the corresponding volume
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Details for article 4 of 10 found articles
| Title: |
Formation of thin-film HfO2/Si(100) structures by high-frequency magnetron sputtering |
| Author: |
Rudakov, V. I. Bogoyavlenskaya, E. A. Denisenko, Yu. I. Naumov, V. V. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 40 (2011) nr. 6 pages 383-388 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 10 found articles
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