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Journal description
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Details for article 9 of 10 found articles
| Title: |
Optical monitoring of substrate temperature and etching speed of multilayered structures during plasmochemical etching |
| Author: |
Volkov, P. V. Goryunov, A. V. Lukyanov, A. U. Pryakhin, D. A. Tertyshnik, A. D. Shashkin, V. I. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 40 (2011) nr. 5 pages 309-315 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 10 found articles
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