Synthesis and investigation of new materials in MIS structures for the development of physical foundations of CMOS technologies of nanoelectronics
Titel:
Synthesis and investigation of new materials in MIS structures for the development of physical foundations of CMOS technologies of nanoelectronics
Auteur:
Zenkevich, A. V. Lebedinskii, Yu. Yu. Matveev, Yu. A. Barantsev, N. S. Voronov, Yu. A. Sogoyan, A. V. Nevolin, V. N. Chichkov, V. I. Spiga, S. Fanchulli, M.