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                                       Details for article 5 of 9 found articles
 
 
  Obtaining multicomponent films by the plasma-stimulated method
 
 
Title: Obtaining multicomponent films by the plasma-stimulated method
Author: Bochkarev, V. F.
Ovcharov, V. V.
Appeared in: Russian microelectronics
Paging: Volume 38 (2009) nr. 3 pages 160-164
Year: 2009
Contents:
Publisher: SP MAIK Nauka/Interperiodica, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 9 found articles
 
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