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Journal description
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Details for article 2 of 8 found articles
| Title: |
Formation of the TiN/CoSi2 system by rapid thermal annealing of a Co/Ti/Si structure |
| Author: |
Rudakov, V. I. Gusev, V. N. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 37 (2008) nr. 4 pages 215-225 |
| Year: |
2008 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 8 found articles
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