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Details for article 15 of 16 found articles
| Title: |
Uniformity of Optical Constants in Amorphous Ta2O5 Thin Films as Measured by Spectroscopic Ellipsometry |
| Author: |
V. A. Shvets D. V. Gritsenko V. Sh. Aliev S. I. Chikichev S. V. Rykhlitskii |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 33 (2004) nr. 5 pages 7 p. |
| Year: |
2004-09/10-/10 |
| Contents: | |
| Publisher: |
Kluwer Academic/Plenum Publishers, New York, U.S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 16 found articles
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