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                                       Details for article 9 of 18 found articles
 
 
  Optimizing Light-Source Aperture for Off-Axis Illumination in Optical Nanolithography: Theoretical Consideration
 
 
Title: Optimizing Light-Source Aperture for Off-Axis Illumination in Optical Nanolithography: Theoretical Consideration
Author: V. V. Ivin
T. M. Makhviladze
K. A. Valiev
Appeared in: Russian microelectronics
Paging: Volume 33 (2004) nr. 3 pages 10 p.
Year: 2004-05/06-/06
Contents:
Publisher: Kluwer Academic/Plenum Publishers, New York, U.S.A.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 9 of 18 found articles
 
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